Research on Acid Etching Wafer With the High Glossiness

Research on Acid Etching Wafer With the High Glossiness

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In order to improve the glossiness of acid etched wafer and achieve stable mass production, by optimizing process of producing silicon wafer, rotate and grind the wafer to be double-sided grinding wafer, then acid etch the oliver peoples aero 57 wafer.The glossiness of acid etched wafer reached more than 360 Gu (re fl ectivity greater than 98%) and the service golden literider gp162 parts life of etchant was extended to 50 000 wafers.The application field of acid etching wafer was expanded, the processing cost of products was reduced and the processing efficiency of products was improved.